Our customers say…“If I had Trazar AIM Networks to offer my customers along with my current RF power products, I would be doing cartwheels.”
—An RF Competitor's Sales Manager
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AIM Networks, RF Generators & E-Chuck
Power Supplies
AIM NETWORKS
 Trazar's Automatic Match Units (AMU's) are known within the
industry as Automatic Impedance Matching (AIM) networks. These
custom network systems are designed for the semiconductor, flat
panel display, thin film media and analytical instrument markets.
These markets demand precise and reliable operation, under a
wide variety of process conditions, to ensure optimum yields
with a minimum of downtime. The AIM network's servo control system
finds the correct tune condition for any load within its range.
Total automatic tuning guarantees fast, efficient and accurate
setup with no operator intervention required. Trazar's AMU's
include the un-ionized process chamber (no-glow condition) in
its matching range. This virtually ensures striking the plasma
process without momentarily increasing RF power or otherwise
modifying the process conditions.
Trazar's extremely compact AIM Networks are designed to be integrated
into custom network configurations that meet the exact specifications
of major semiconductor customers. The Trazar 13.56 MHz, 3-5kW
AIM Networks are completely air-cooled, self-contained in a single
module. Multiple units are easily networked for installations
where the power must be split to drive two electrodes, or when
more than one RF generator, possibly with different frequencies,
is required.
RF GENERATORS
The Qinto series RF Generators are offered through a joint marketing
and development agreement between Trazar Corporation and Huettinger
Electronics of Germany. The Qinto was developed as the first
in a series of RF power supplies targeted for the semiconductor
plasma processes. The initial 13.56MHz unit is 3kW, with higher
power units to follow. The 50 ohm units are water cooled with
RS232C and RS 485 interfaces and they are microprocessor controlled.
The Qinto comes in both a 19” rack-mount version and a
power module version. See the brief data
sheet referenced above
or click here to view
or download a complete set of specifications.
ELECTROSTATIC CHUCK CONTROLLERS (E-Chuck
Power)
Trazar offers a complete line of sophisticated Electrostatic
Chuck Controllers for both the 200mm and the latest 300mm plasma
based processes. Both the Elite ECC 1-4F (200mm) unit and the
Elite ECC 3-1 (300mm) are high voltage power supplies for bipolar
chucks. Please contact Trazar at sales@trazar.com for detailed
specifications.
Some key Trazar customers...
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