High Power RF Products: 20W to 5kW RF (AMU10H-1)
Trazar automatic impedance matching networks are custom designed
for the semiconductor, flat panel display, thin film media and
analytical instrument market where precise and reliable operation
is needed to ensure optimum yields and minimum downtime. The
popular Trazar Model AMU10H-1 converts the complex impedance
of a plasma at 13.56 MHz and other frequencies to a 50-ohm resistive
load for the generator. Accommodating a wide range of RF power
(from 25W to 5,000W) and process conditions without additional
procedures or adjustments make the AMU10H-1 the most flexible
and economical choice utilizing primary 24V, DC power for a variety
of applications.
Trazar also offers its Assured Quality Product (AQP) Program
for AIM Network service and repair.
- Maximum RF Power: 5kW subject to load impedance
- Network Input Impedance: 50 Ohms nominal (HN connector)
- Load Impedance and Network Efficiency: Smith Chart illustrating
tuning range, network power handling and network efficiency
available upon request
- Reflected Power: 1% max. of forward power for forward power
between 20W and 5kW (13.56 MHz generator only)
- Primary AC Power: 120 + 10%, -15% RMS volts, 50-60 Hz, 1
Amp RMS max. connector, IEC 320
- Fuse: 1 Amp slow blow, 0.25 diameter x 1.25 in.
- User Interface: DA-15, 15-pin female sub-miniature D
- Outline Dimensions: 152.4 x 310.9 x 322.4 mm (6.00 x 12.24
x 12.69 inches) nominal
- Weight: 6.4 kg (14 pounds) maximum
- Cooling: Forced air
- Mounting Surface: 70 degrees C maximum
- Maximum Altitude: 1700 meters (5577 feet) Determines internal
arcing voltage limits
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