High Power RF Products: 25W-5,000W (AMU2-1)
Trazar automatic impedance matching networks are custom designed
for the semiconductor, flat panel display, thin film media and analytical
instrument market where precise and reliable operation is needed
to ensure optimum yields and minimum downtime. The basic Trazar
Model AMU2-1 converts the complex impedance of a plasma at 13.56
MHz and other frequencies to a 50-ohm resistive load for the generator.
Accommodating a wide range of RF power (from 25W to 5,000W) and
process conditions without additional procedures or adjustments
make the AMU2-1 the most flexible and economical choice utilizing
primary 120V, AC power for a variety of applications.
Trazar also offers its Assured Quality Product (AQP) Program for
AIM Network service and repair.
AMU2-1 Specifications
- Maximum RF Power: 20W to 5kW subject to load impedance, Smith
Chart illustrating tuning range and network power handling capability
available upon request
- Network Output Impedance: 50 Ohms nominal
- Load Impedance & Network Efficiency: Smith Chart illustrating
tuning range and network efficiency available upon request (efficiency
dependent on load)
- Maximum Output Voltage: 2.8 Kv peak (112 KVA) at 13.56 MHz
- Maximum Output Current: 40 Amps RMS
- Coaxial Connector: HN or LC connectors
- Reflected Power/Tuning Accuracy: 1% max. of forward power for
forward power between 20W and 5kW (13.56MHz generators only)
- Switch Ratings: 10A, 120VAC, 1A, 28VDC inductive. This circuit
is available on the DA-15, User Connector
- User Interface: DA-15, 15 - pin female sub-miniature D
- Weight: 6.4 k (14 pounds) nominal
- Cooling: Forced air
- Mounting Surface: 70 degrees C maximum
- Maximum Altitude: 1700 meters (5577 feet)
- Interlock Circuit:
- Circuit will normally be closed when:
a) RF connector cover is closed
b) When a NET-STRESS condition does not exist
c) When the end cover plate is in place
d) When power is applied to the Match
- Capacitor Position Indicator: Not available on this model
- Primary Power: Primary AC Power: 120V + 10%, -15% RMS, 50 to
60 Hz, 1 Ampere RMS, maximum connector, IEC 320
- Fuse: 1 Ampere slow-blow
- Outline Dimensions: 147.3 x 223.5 x 304.8 mm (5.8 x 8.8 x 12
inches) nominal
- Accessories: Automatic or manual control adapter
Average MTBF : >40 month
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