Trazar Elite Model Electrostatic Chuck Controllers
Trazar offers high voltage power supplies with integrated RF monitoring and control circuitry. The Elite Model Series offers bipolar and monopolar clamping voltages which can offer positive and/or negative offset voltages.
Example: Elite Model ECC3-1: ±1250V with -1000V & +500V offset.
In addition, Trazar offers optional and customized RF filters and polarity reversal for wafer release.
ELITE MODEL #'S & FEATURES |
Elite Model # |
Clamp
Voltage |
Offset
Voltage |
Optional
RF Filters |
Polarity
Switching |
| ECC1-1 |
±1250V |
-1000V |
N/A |
Yes |
| ECC1-3 |
±1250V |
-1000V |
Yes |
Yes |
| ECC1-4 |
±1250V |
-1000V |
N/A |
No |
| ECC1-4F |
±1250V |
-1000V |
Yes |
No |
| ECC1-5 |
±1250V |
-1000V |
Yes |
Yes |
| ECC1-1M |
±1250V |
-1000V |
N/A |
No |
| ECC1-6 |
-3000V |
-1000V |
Yes |
No |
| ECC3-1* |
±1250V |
-1000V & 500V |
N/A |
No |
| ECC3-2 |
±1250V |
-1000V or +500V |
Yes |
Yes |
| ECC3-3 |
±1250V |
+500V |
Yes |
No |
| *300mm ECC Unit |
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