Trazar RF Duo™
Trazar Corporation now offers a complete RF Matching and power
solution for the semiconductor manufacturing industry. The Trazar
RF Duo ™ includes Trazar’s custom, Automatic Impedance
Matching (AIM) Network with a 13.56 MHz, 3kW RF power source.
Together, they provide capital equipment OEMs with an RF solution
with unequalled quality and reliability.
Targeted at leading edge plasma etch and deposition systems,
the Trazar RF Duo ™ provides leading semiconductor capital
equipment makers with a complete RF power solution. Historically,
the reliability of plasma systems using other Match solutions
has been plagued by failure of the impedance Matching network,
many of which last only 3-6 months before needing service and
repairs. These unanticipated failures of the Matching unit result
in expensive yield and productivity losses.
The Trazar RF Duo ™ boasts a demonstrated, 44-month MTBF
and a 36-month warranty for the AIM, 50 to 100% longer warranty
than other AIM market alternatives. Additionally, the Trazar
AIM Network provides the industry’s fastest tuning, essential
for accurate process control in critical sub-micron plasma etching
and deposition process steps. Trazar’s high performance
RF Suite allows manufacturers to immediately reap the benefits
of increased line yields, improved productivity and decreased
downtime.
|
 |
