High Power RF Products: Megasonic / Ultrasonic RF Generators
Trazar is now offering Megasonic, high frequency RF generators. These RF power systems accurately control the delivery to transducer arrays used in wet process cleaning applications. Megasonic or High Frequency ultrasonic cleaning requires a flexible RF generator hat gives users consistent and repeatable performance.
Whether your application is Megasonic or High Frequency Ultrasonic; whether your process is cleaning semiconductor wafers, substrates, disks, flat-panel displays or precision mechanical / medical components, Trazar's RF power generators excel as transducer drivers.
RF GENERATORS FOR MEGASONIC AND ULTRASONIC CLEANING
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SPA400D-2B/220
- 400 Watts
- 150V Max
- .7 - 1.2 MHz
- Dual Channel / -4 Multiplex Outputs per Channel)
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RFG-4
- 1600 Watts
- 283V Max
- 875 - 975 kHZ
- Single Channel
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MEGASONIC / ULTRASONIC RF GENERATOR SPECIFICATIONS
Power & Frequency Ranges
- 100 to 1600 Watts
- 350 kHZ to 2 MHz
- CE qualified
Operator Control (optional choices)
- Keypad
- Personal computer
- Handheld controller
Footprint Choice
- Rack Mount
- Full width
- Half width
Generator Control
- Auto sweep for optimum frequency settings
- Transducer performance optimized for varying load conditions
- Reflected power minimized to prevent standing waves
RF Output Channels
- Single RF generator
- Dual RF generator
- Each channel has independent power and frequency selection
- Compatible with a wide range of transducer array
Operating Protocol
- Standard:
- Uses preset instructions
- Controls specific generator functions
- Reads and monitors designated parameters
- Custom:
- Tailored to user's specific requirements and recipes
- Designed for compatibility
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JOINT SYSTEM ENGINEERING
Trazar RF system engineers will work closely with the customer to ensure that the RF Power Generator provides the most efficient and cost effective transducer driver for their cleaning application. The support from Trazar's engineering team extends from hardware definition, through interface design, to the development of the generator's software to provide process control and information feedback.
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