Trazar Corporation  
First in RF power reliability, located in Silicon Valley
Trazar Corporation, Igniting a Vision
 
 
 
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Trazar T5000 Warranty Qualification

The following are the details required in order for Trazar to offer a 12 month factory warranty on the Trazar T5000 enhancement for the AMAT P5000 RF Matching unit.

  • Trazar’s 12 month T5000 warranty is only valid for AMAT P5000 Matching units running established, stable production plasma processes.  (Not valid on prototype or experimental processes.)
  • To qualify for the Trazar T5000, 12 month factory warranty, the operating conditions for the of the AMAT P5000 Match must meet the following criteria.  (Below are the basic operational parameters for the AMAT P5000 Series RF matching units.)
    • Capacitor Position Range: -3.6V to +3.6V
    • Inductor Position Range:    -3.06V to +3.06V
  • If a non-functional P5000 is submitted for a T5000 enhancement upgrade, the T5000 Matrix Questionnaire Form will need to be provided to Trazar after the enhanced unit is reinstalled into the customer’s system.  Without this data, Trazar cannot confirm the units operating conditions required for fulfilling the 12 month warranty qualification.  If this data is not provided by the customer, the default 90 day warranty will apply.

P5000 MATCHING UNITS OPERATING "ON THE EDGE" OR OUTSIDE OF THE STATED OPERATING CONDITION CRITERIA

There are two options for units that are operating outside the stated capacitance and inductance limits:

Option 1:

Instead of a T5000 enhancement, Trazar could perform a P5000 Bronze or Gold repair service and issue a standard 90 day service warranty.

Option 2:

It may be determined that the tuning range can be re-aligned to position the center of the Matching unit’s tuning range.  This “Modified T5000” would be completed at the same price as a standard T5000 enhancement.  (This “Modified T5000” re-alignment can only be performed on an operational P5000 Matching unit.)

T5000 ENHANCEMENT FOR P5000 MATCHING UNITS RUNNING MULTIPLE PROCESSES

The Trazar T5000 enhancement can also be performed on P5000 Matching units that regularly run multiple, stable, plasma processes.  In order to assure that the T5000 will function as required for all of the processes, Trazar must be made aware of the operating conditions of the Matching unit in “each of the multiple process”.  This can be done by submitting the data for each process on a Trazar T5000 Matrix Questionnaire form. 

WARRANTY RETURNS ON A TRAZAR T5000 MATCHING UNIT

Customers returning a T5000 to Trazar must email Trazar Customer Service or call (408) 970-9501, and request a Return Materials Authorization Number (RMA#), and they must also provide a Purchase Order for $300.00USD.  If the operating conditions have changed, the customer must also submit a new Trazar T5000 Matrix Questionnaire Form along with the returned unit.

If the unit is inspected and found to need valid warranty services, the $300. P.O. will be cancelled.  The unit will then be repaired by Trazar and returned, at no cost to the customer.

If the unit is inspected and found to be damaged, missing key components or non-functional due to obvious improper installation or mishandling, the $300.00 P.O. will be validated.  (The customer will also be notified prior to performing the repair, if the final repair costs will exceed the initial $300.00 service fee.)

NO FAULT FOUND

Many times, RF Matches that are returned for repair, are tested and there is “no fault found”.  The Matching unit is found to be performing according to the original manufacturer’s operating specifications.  This usually occurs because there is a Fab process problem or the plasma system problem was mistakenly targeted as an RF Matching unit malfunction.  If this occurs, the unit’s alignment will be reconfirmed by Trazar and the unit will be returned to the customer as a “no fault found” repair.  The customer will then be charged the $300.00 evaluation and alignment fee.

Download the Trazar T5000 Matrix Questionnaire Form here.